IEEE - Institute of Electrical and Electronics Engineers, Inc. - High Tactile Sensitivity of Piezoresistive Sensors with a Micro-crack Structure Induced by Thin Film Tension

Author(s): Longlong Chen ; Jiayu Feng ; Tongkuai Li ; Xifeng Li ; Jianhua Zhang
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 1558-0563
ISSN (Paper): 0741-3106
DOI: 10.1109/LED.2019.2927720
Regular:

A simple high-performance piezoresistive tactile sensor based on polymer film micro-cracks is proposed in this study. The cracks are automatically formed by the self-tension of the metal layer... View More

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