IEEE - Institute of Electrical and Electronics Engineers, Inc. - A low-g MEMS inertial switch based on direct contact sensing method

Author(s): Zhuang Xiong ; Chao Wang ; Fengtian Zhang ; Jin Xie ; Zhaoyang Shen ; Bin ; Tang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 2156-3985
ISSN (Paper): 2156-3950
DOI: 10.1109/TCPMT.2019.2926332
Regular:

A MEMS low-g inertial switch is typically used for linearly increased/decreased acceleration signal sensing. In this paper, we introduce a novel design concept of MEMS inertial switch based on... View More

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