IEEE - Institute of Electrical and Electronics Engineers, Inc. - An analytical equivalent circuit model for optimization design of a broadband piezoelectric micromachined ultrasonic transducer with an annular diaphragm

Author(s): Tingzhong Xu ; Libo Zhao ; Zhuangde Jiang ; Shuaishuai Guo ; Zhikang Li ; Guoxi Luo ; Lin Sun U ; Liangchi Zhang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 1525-8955
ISSN (Paper): 0885-3010
DOI: 10.1109/TUFFC.2019.2928147
Regular:

This paper presents an equivalent circuit model, a systematic design and optimization method for developing a broadband annular diaphragm PMUT (A-PMUT). By utilizing array analysis methods, an... View More

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