Optical Society (The) (OSA) - Germanium photodiodes on pyramidal textured surface by Metal-Assisted Chemical Etching

2019 Conference on Lasers and Electro-Optics (CLEO)

Author(s): Munho Kim ; Soongyu Yi ; Jeong Dong Kim ; Xin Yin ; Jun Li ; Jihye Bong ; Dong Liu ; Shih-Chia Liu ; Alexander Kvit ; Weidong Zhou ; Xudong Wang ; Zongfu Yu ; Zhenqiang Ma ; Xiuling Li
Publisher: Optical Society (The) (OSA)
Publication Date: 1 May 2019
Conference Location: San Jose, CA, USA, USA
Conference Date: 5 May 2019
Page(s): 1 - 2
ISBN (Electronic): 978-1-943580-57-6
DOI: 10.23919/CLEO.2019.8749589
Regular:

We demonstrate a Ge photodiode on pyramidal textured surface by Metal-Assisted Chemical Etching (MacEtch) technique. This photodiode shows both reduced dark current and enhanced responsivity at... View More

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