Optical Society (The) (OSA) - Large-Area, Single Material Metalens in the Visible: An Approach for Mass-Production Using Conventional Semiconductor Manufacturing Techniques

2019 Conference on Lasers and Electro-Optics (CLEO)

Author(s): Joon-Suh Park ; Shuyan Zhang ; Alan She ; Wei-Ting Chen ; Kerolos M. A. Yousef ; Federico Capasso
Publisher: Optical Society (The) (OSA)
Publication Date: 1 May 2019
Conference Location: San Jose, CA, USA, USA
Conference Date: 5 May 2019
Page(s): 1 - 2
ISBN (Electronic): 978-1-943580-57-6
DOI: 10.1364/CLEO_SI.2019.STh1O.5

We present mass-producible, large area, single-material metalens working in the visible wavelength, using conventional deep-ultraviolet (DUV)stepper lithography technique. Having a diameter of 1... View More