IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Monolithic Integration Bio-inspired Three-Dimensional MEMS Vector Hydrophone

Author(s): Jinlong Song ; Renxin Wang ; Guojun Zhang ; Zhenzhen Shang ; Lansheng Zhang ; Wendong Zhang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 2169-3536
DOI: 10.1109/ACCESS.2019.2924990
Regular:

Three-dimensional vector hydrophone plays an important role in underwater spatial location. In order to solve the problems of monolithic integration and linearity of previous three-dimensional... View More

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