IEEE - Institute of Electrical and Electronics Engineers, Inc. - Hierarchical Equipment Health Index Framework

Author(s): Chia-Yen Lee ; Zhao-Hong Dong
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 1558-2345
ISSN (Paper): 0894-6507
DOI: 10.1109/TSM.2019.2925362
Regular:

In the semiconductor manufacturing industry the development of single index assessing the equipment health condition is urgent, and thus the dashboard can be used for monitoring thousands of... View More

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