IEEE - Institute of Electrical and Electronics Engineers, Inc. - Origins and Mechanisms of Bias Instability Noise in a Three-Axis Mode-Matched MEMS Gyroscope

Author(s): Tobias Hiller ; Zsigmond Pentek ; Jan-Timo Liewald ; Alexander Buhmann ; Hubert Roth
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1 - 11
ISSN (Electronic): 1941-0158
ISSN (Paper): 1057-7157
DOI: 10.1109/JMEMS.2019.2921607
Regular:

In this paper, we examine the origins of bias instability in three-axis, mode-matched MEMS gyroscopes. Reducing this drift phenomenon is crucial for highly accurate navigation in applications,... View More

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