IEEE - Institute of Electrical and Electronics Engineers, Inc. - Ultrasensitive NH₃ Gas Sensor Based on Au/ZnO/n-Si Heterojunction Schottky Diode

Author(s): Deepak Punetha ; Saurabh Kumar Pandey
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1 - 8
ISSN (Electronic): 1557-9646
ISSN (Paper): 0018-9383
DOI: 10.1109/TED.2019.2921990
Regular:

An ultrasensitive ammonia gas sensor based on Au/ZnO/n-Si heterojunction Schottky diode has been fabricated by using sputtering system and photolithography. Device properties such as structural,... View More

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