Optical Society (The) (OSA) - Single-Step Fabrication of Multispectral Filter Arrays Using Grayscale Lithography and Metal-Insulator-Metal Geometry

2018 Conference on Lasers and Electro-Optics (CLEO)

Author(s): Calum Williams ; George S. D. Gordon ; Timothy D. Wilkinson ; Sarah E. Bohndiek
Publisher: Optical Society (The) (OSA)
Publication Date: 1 May 2018
Conference Location: San Jose, CA, USA
Conference Date: 13 May 2018
Page(s): 1 - 2
ISBN (Electronic): 978-1-943580-42-2

Metal-insulator-metal geometries can provide optical transmission filtering, with peak wavelength dependent on insulator thickness. Using grayscale electron beam lithography to control... View More