IEEE - Institute of Electrical and Electronics Engineers, Inc. - Real-Time Compensation of Simultaneous Errors Induced by Optical Phase Difference and Substrate Motion in Scanning Beam Laser Interference Lithography System

Author(s): Minsoo Kim ; Changsu Park ; Soonkyu Je ; Hoseung Jang ; Chulmin Joo ; Shinill Kang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2018
Volume: 23
Page(s): 1,491 - 1,500
ISSN (Electronic): 1941-014X
ISSN (Paper): 1083-4435
DOI: 10.1109/TMECH.2018.2841019
Regular:

Recent advances in display electronics, and micro- and nanophotonics have prompted development of novel nanofabrication technologies that enable production of high-fidelity periodic patterns over... View More

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