IEEE - Institute of Electrical and Electronics Engineers, Inc. - Improvement of material quality of (100) and (111) Ge-on-insulator substrates fabricated by smart-cut technology

2019 Electron Devices Technology and Manufacturing Conference (EDTM)

Author(s): Cheol-Min Lim ; Mitsuru Takenaka ; Shinichi Takagi
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 March 2019
Conference Location: Singapore, Singapore, Singapore
Conference Date: 12 March 2019
Page(s): 139 - 141
ISBN (Electronic): 978-1-5386-6508-4
DOI: 10.1109/EDTM.2019.8731205
Regular:

Physical and electrical characteristics of (111) Ge-on-insulator (GOI) substrates fabricated by the smart-cut technology and the dependence of annealing temperature are studied in comparison with... View More

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