IEEE - Institute of Electrical and Electronics Engineers, Inc. - Robust BEOL MIMCAP for Long and Controllable TDDB Lifetime

2019 IEEE International Reliability Physics Symposium (IRPS)

Author(s): Lili Cheng ; Seungman Choi ; Sean Ogden ; Teck Jung Tang ; Robert Fox
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 March 2019
Conference Location: Monterey, CA, USA, USA
Conference Date: 31 March 2019
Page(s): 1 - 3
ISBN (Electronic): 978-1-5386-9504-3
ISSN (Electronic): 1938-1891
DOI: 10.1109/IRPS.2019.8720407
Regular:

As operating frequency of the chips keeps increasing, high capacitance density MIMCap is needed to mitigate voltage droop for faster current injection. With high capacitance density, it is... View More

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