IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fault Detection and Diagnosis Using Self-Attentive Convolutional Neural Networks for Variable-length Sensor Data in Semiconductor Manufacturing

Author(s): Eunji Kim ; Sungzoon Cho ; Byeongeon Lee ; Myoungsu Cho
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 1558-2345
ISSN (Paper): 0894-6507
DOI: 10.1109/TSM.2019.2917521
Regular:

Nowadays, more attention has been placed on cost reductions and yield enhancement in the semiconductor industry. During the manufacturing process, a considerable amount of sensor data called... View More

Advertisement