IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Novel Indirect Quasi-Static Actuation Concept for 2D MEMS Micromirrors

Author(s): Philip Kaupmann ; Stefan Pinter ; Jochen Franz ; Reinhard Streiter ; Thomas Otto
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 April 2019
Volume: 28
Page(s): 226 - 234
ISSN (Electronic): 1941-0158
ISSN (Paper): 1057-7157
DOI: 10.1109/JMEMS.2019.2897755
Regular:

We present a 2D MEMS raster scanning micromirror based on a novel actuation concept for the (quasi-)static axis. This is based on the distortion of the angular momentum generated by the primary... View More

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