IEEE - Institute of Electrical and Electronics Engineers, Inc. - Bending Deformation of Multiple Aligned Plates Toward Coalescence Induced by Capillarity

Author(s): Kosuke Takahashi ; Takahiro Matsuo ; Kazuaki Inaba ; Kikuo Kishimoto
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1 - 10
ISSN (Electronic): 1941-0158
ISSN (Paper): 1057-7157
DOI: 10.1109/JMEMS.2019.2913012
Regular:

Deformation induced by capillarity needs to be characterized appropriately to avoid unexpected collapse or to control self-assembly of fine structures. Nevertheless, even simple phenomena such as... View More

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