IEEE - Institute of Electrical and Electronics Engineers, Inc. - Thin-Film SUEX as an Anti-Reflection Coating for mmW and THz Applications

Author(s): Seckin Sahin ; Niru K. Nahar ; Kubilay Sertel
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 2156-3446
ISSN (Paper): 2156-342X
DOI: 10.1109/TTHZ.2019.2915672
Regular:

We present a simple process for depositing SUEX dry films to realize effective anti-reflection coatings on high resistivity Silicon wafers and lenses. Heat-assisted conformal deposition of SUEX... View More

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