IEEE - Institute of Electrical and Electronics Engineers, Inc. - Study of Energy Loss Mechanisms in AlN-Based Piezoelectric Length Extensional-Mode Resonators

Author(s): Afzaal Qamar ; Stewart Sherrit ; Xu-Qian Zheng ; Jaesung Lee ; Philip X.-L. Feng ; Mina Rais-Zadeh
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1 - 9
ISSN (Electronic): 1941-0158
ISSN (Paper): 1057-7157
DOI: 10.1109/JMEMS.2019.2913875
Regular:

This paper reports on the investigation of anomalous low quality factors (Qs) in AlN thin film-based length extensional (LE)-mode resonators using finite element method (FEM), analytical modeling,... View More

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