IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Low Power Cantilever-Based Metal Oxide Semiconductor Gas Sensor

Author(s): Dongcheng Xie ; Dongliang Chen ; Shufeng Peng ; Yujie Yang ; Lei Xu ; Feng Wu
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 1558-0563
ISSN (Paper): 0741-3106
DOI: 10.1109/LED.2019.2914271
Regular:

This letter, for the first time, reports a novel metal oxide semiconductor (MOS) gas sensor based on a single cantilever. The extremely brief Platinum microheater without any coil, is on a 10 lm... View More

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