IEEE - Institute of Electrical and Electronics Engineers, Inc. - Silicon Nitride/Silicon Dioxide Echelle Grating Spectrometer for Operation Near 1.55 μm

Author(s): Shengjie Xie ; Yang Meng ; Joss Bland-Hawthorn ; Sylvain Veilleux ; Mario Dagenais
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2018
Volume: 10
Page(s): 1 - 7
ISSN (CD): 1943-0647
ISSN (Electronic): 1943-0655
DOI: 10.1109/JPHOT.2018.2880182
Regular:

Here we use an electron beam lithography system to pattern an Si3N4/SiO2 echelle grating using silver as a reflector on the grating grooves. The grating in this... View More

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