IEEE - Institute of Electrical and Electronics Engineers, Inc. - Time-Resolved Electron Density Measurement Characterization of E-H-Modes for Inductively Coupled Plasma Instabilities

Author(s): David J. Coumou ; Shaun T. Smith ; David J. Peterson ; Steven C. Shannon
Sponsor(s): IEEE Nuclear and Plasma Sciences Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1 - 8
ISSN (Electronic): 1939-9375
ISSN (Paper): 0093-3813
DOI: 10.1109/TPS.2019.2909476
Regular:

Inductively coupled plasma sources driven by RF power at low-pressure regimes are well adopted for high-volume manufacturing of semiconductor devices. One vexing challenge to the utility of these... View More

Advertisement