IEEE - Institute of Electrical and Electronics Engineers, Inc. - Ultra-Low Profile Integrated Magnetic Inductors and Transformers for HF Applications

Author(s): Jean-Philippe Michel ; Henri Sibuet ; Nicolas Buffet ; Jean-Claude Bastien ; Rachid Hida ; Bernard Viala ; Patrick Poveda ; Anne-Sophie Berneux-Dugast ; Erwan Bruno ; Claudiu Valentin Falub
Sponsor(s): IEEE Magnetics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1 - 7
ISSN (Electronic): 1941-0069
ISSN (Paper): 0018-9464
DOI: 10.1109/TMAG.2019.2905985
Regular:

Ultra-low profile integrated magnetic solenoid inductors and transformers were fabricated on 200 mm wafers with back end of line (BEOL) techniques. The process uses thick copper metallization,... View More

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