IEEE - Institute of Electrical and Electronics Engineers, Inc. - Limits on thinning of boron layers with/without metal contacting in PureB Si (photo)diodes

Author(s): Tihomir Knezevic ; Xingyu Liu ; Erwin Hardeveld ; Tomislav Suligoj ; Lis K. Nanver
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 1558-0563
ISSN (Paper): 0741-3106
DOI: 10.1109/LED.2019.2910465
Regular:

A little more than a monolayer-thick pure-boron (PureB) layer was deposited on silicon at 250:C by chemical vapor deposition (CVD), forming junctions with low saturation current. They displayed... View More

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