IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Computational Piezoelectric Micro-Machined Ultrasonic Transducer Towards Acoustic Communication W

Author(s): Xinxin Liu ; Dongyang Chen ; Dengfei Yang ; Xuying Chen ; Xianhao Le ; Jin Xie
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 1558-0563
ISSN (Paper): 0741-3106
DOI: 10.1109/LED.2019.2910174
Regular:

Piezoelectric micro-machined ultrasonic transducers (pMUTs) are getting popularity in integrated smart ultrasonic systems. In this work, we report a pMUT towards acoustic communication with... View More

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