IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and Experiment of Dual-mass MEMS Gyroscope Sense Closed System Based on Bipole Compensation Method

Author(s): Huiliang Cao ; Yu Liu ; Yingjie Zhang ; Xingling Shao ; Jinyang Gao ; Kun Huang ; Yunbo Shi ; Jun Tang ; Chong Shen ; Jun Liu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 2169-3536
DOI: 10.1109/ACCESS.2019.2909973
Regular:

This paper presents a sense mode closed-loop method for dual-mass micro-electro-mechanical system (MEMS) gyroscopes based on the bipole temperature compensation method. A pair of conjugate... View More

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