IEEE - Institute of Electrical and Electronics Engineers, Inc. - K-Cyclic Schedules and the Worst-Case Wafer Delay in a Dual-Armed Cluster Tool

Author(s): Dong-Hyun Roh ; Tae-Gyung Lee ; Tae-Eog Lee
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 1558-2345
ISSN (Paper): 0894-6507
DOI: 10.1109/TSM.2019.2910399
Regular:

In a cluster tool for semiconductor manufacturing, a wafer waits within a chamber after processing until it is unloaded by the robot. Such wafer delays degrade wafer quality due to residual gases... View More

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