IEEE - Institute of Electrical and Electronics Engineers, Inc. - 870 000 $Q$ -Factor Capacitive Lamé Mode Resonator With Gap Closing Electrodes Enabling 4.4 k $\Omega$ Equivalent Resistance at 50 V

Author(s): Mohannad Y. Elsayed ; Frederic Nabki
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 April 2019
Volume: 66
Page(s): 717 - 726
ISSN (Electronic): 1525-8955
ISSN (Paper): 0885-3010
DOI: 10.1109/TUFFC.2019.2892227
Regular:

This work presents a Lamé mode resonator featuring a novel gap closing mechanism, which employs electrostatic force to reduce the capacitive transduction gaps to submicrometer values in order to... View More

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