IEEE - Institute of Electrical and Electronics Engineers, Inc. - Analysis of Chloride Ion Sensor Modified by Graphene Oxide Under Microfluid Flow

Author(s): Jung-Chuan Chou ; Ting-Wei Tseng ; Yi-Hung Liao ; Chih-Hsien Lai ; Siao-Jie Yan ; You-Xiang Wu ; Cian-Yi Wu ; Si-Hong Lin
Sponsor(s): IEEE Sensors Council
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2019
Volume: 19
Page(s): 3,217 - 3,223
ISSN (CD): 2379-9153
ISSN (Electronic): 1558-1748
ISSN (Paper): 1530-437X
DOI: 10.1109/JSEN.2019.2892041
Regular:

In this paper, we used a thermal evaporation system and a radio-frequency sputtering system to fabricate aluminum (Al) electrodes and indium-gallium-zinc oxide (IGZO) sensing membranes on the... View More

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