IEEE - Institute of Electrical and Electronics Engineers, Inc. - Transmitting Sensitivity Enhancement of Piezoelectric Micromachined Ultrasonic Transducers via Residual Stress Localization by Stiffness Modification

Author(s): Xuying Chen ; Dongyang Chen ; Xinxin Liu ; Dengfei Yang ; Jintao Pang ; Jin Xie
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 1558-0563
ISSN (Paper): 0741-3106
DOI: 10.1109/LED.2019.2904293
Regular:

Residual stress dramatically affects the performance of piezoelectric micromachined ultrasound transducers (pMUTs), in particular transmitting sensitivity. This letter presents a novel... View More

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