IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Novel Two-Dimensional Sensor with Inductive Spiral Coils

Author(s): Liang Wu ; Qifu Tang ; Xihou Chen ; Shi Xu ; Li Gou ; Yangyang Wang
Sponsor(s): IEEE Sensors Council
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (CD): 2379-9153
ISSN (Electronic): 1558-1748
ISSN (Paper): 1530-437X
DOI: 10.1109/JSEN.2019.2904119
Regular:

Precision measurement of two-dimensional displacements is needed in many domains, such as precision fabrication and detection. This paper presents a novel inductive position sensor with the... View More

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