IEEE - Institute of Electrical and Electronics Engineers, Inc. - Piezoresistive Nanomechanical Humidity Sensors Using Internal Stress In-Plane of Si-Polymer Composite Membranes

Author(s): Md. Mahabub Hossain ; Masaya Toda ; Takumi Hokama ; Mai Yamazaki ; Krzysztof Moorthi ; Takahito Ono
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 February 2019
Volume: 3
Page(s): 1 - 4
ISSN (Electronic): 2475-1472
DOI: 10.1109/LSENS.2019.2893298
Regular:

This article presents the design and fabrication process of a highly miniaturized nanomechanical Si-polymer composite membrane-type internal-stress sensor (MIS) with piezoresistive elements for... View More

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