IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Customized Nonlinear Micro-Flexure for Extending the Stable Travel Range of MEMS Electrostatic Actuator

Author(s): Xiaojian Xiang ; Xuhan Dai ; Kai Wang ; Zhuoqing Yang ; Yunna Sun ; Guifu Ding
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1 - 10
ISSN (Electronic): 1941-0158
ISSN (Paper): 1057-7157
DOI: 10.1109/JMEMS.2019.2894669
Regular:

The stable travel range of parallel-plate electrostatic actuator with a linear suspension flexure is limited to a third of the nominal gap due to the pull-in instability resulting from the... View More

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