IEEE - Institute of Electrical and Electronics Engineers, Inc. - Process Yield Index and Variable Sampling Plans for Autocorrelation between Nonlinear Profiles

Author(s): Yeneneh Tamirat
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 2169-3536
DOI: 10.1109/ACCESS.2018.2889909
Regular:

In this paper, a process yield-index for autocorrelation between nonlinear profiles is proposed. Applying a one-dimensional Taylor series expansion, the mean and variance of the estimator of the... View More

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