IEEE - Institute of Electrical and Electronics Engineers, Inc. - Backside-illuminated CMOS Photodiodes with Embedded Polysilicon Grating Reflectors

Author(s): Yung-Jr Hung ; Chen-Han Lu ; Jian-Fu Liao ; Min-Chun Hsieh
Sponsor(s): IEEE Lasers and Electro-Optics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 1941-0174
ISSN (Paper): 1041-1135
DOI: 10.1109/LPT.2018.2889837
Regular:

In this study, we investigated the feasibility of replacing metal mirrors with polysilicon gratings to serve as compact optical back reflectors in thin backside-illuminated CMOS photodiodes... View More

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