IEEE - Institute of Electrical and Electronics Engineers, Inc. - Particle Tracking of Microelectromechanical System Performance and Reliability

Author(s): Craig R. Copeland ; Craig D. McGray ; Jon Geist ; Samuel M. Stavis
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2018
Volume: 27
Page(s): 948 - 950
ISSN (Electronic): 1941-0158
ISSN (Paper): 1057-7157
DOI: 10.1109/JMEMS.2018.2874771
Regular:

Microelectromechanical systems (MEMS) that require contact of moving parts to implement complex functions exhibit limits to their performance and reliability. Here, we advance our particle... View More

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