IEEE - Institute of Electrical and Electronics Engineers, Inc. - Lamb Wave Focusing Transducer for Efficient Coupling to Wavelength-Scale Structures in Thin Piezoelectric Films

Author(s): Aleem Siddiqui ; Roy H. Olsson ; Matthew Eichenfield
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2018
Volume: 27
Page(s): 1,054 - 1,070
ISSN (Electronic): 1941-0158
ISSN (Paper): 1057-7157
DOI: 10.1109/JMEMS.2018.2865855
Regular:

This paper describes the theoretical and experimental investigation of interdigitated transducers capable of producing focused acoustical beams in thin film piezoelectric materials. A mathematical... View More

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