IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Proactive Plastic Deformation Method for Fine-Tuning of Metal-Based MEMS Devices After Fabrication

Author(s): Yong-Hoon Yoon ; Chang-Hoon Han ; Jae-Shin Lee ; Jun-Bo Yoon
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2018
Volume: 27
Page(s): 1,124 - 1,134
ISSN (Electronic): 1941-0158
ISSN (Paper): 1057-7157
DOI: 10.1109/JMEMS.2018.2871937
Regular:

An innovative plastic deformation method is proposed to tune metal-based MEMS devices after fabrication. The plastic deformation is a well-known failure mechanism in MEMS devices, which includes a... View More

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