IEEE - Institute of Electrical and Electronics Engineers, Inc. - Predicting the Resonance Frequencies in Geometric Nonlinear Actuated MEMS

Author(s): Martin Putnik ; Mateusz Sniegucki ; Stefano Cardanobile ; Matthias Kuhnel ; Steven Kehrberg ; Jan E. Mehner
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2018
Volume: 27
Page(s): 954 - 962
ISSN (Electronic): 1941-0158
ISSN (Paper): 1057-7157
DOI: 10.1109/JMEMS.2018.2871080
Regular:

The operation range of today's micro-electromechanical systems (MEMS) continues to enter the geometric nonlinear regime due to miniaturization and performance requirements. One example is... View More

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