IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design of contactless electromagnetic levitation and electrostatic driven rotation control system for a micro mirror

2018 15th International Conference on Control, Automation, Robotics and Vision (ICARCV)

Author(s): Qijun Xiao ; Kraft Michael ; Zhonghui Luo ; Jianping Chen ; Jianbin Wang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2018
Conference Location: Singapore, Singapore, Singapore
Conference Date: 18 November 2018
Page(s): 1,176 - 1,179
ISBN (Electronic): 978-1-5386-9582-1
ISBN (USB): 978-1-5386-9581-4
DOI: 10.1109/ICARCV.2018.8581285
Regular:

It is proposed in this paper the design of a contactless electromagnetic levitation and electrostatic driven rotation control system for a micro mirror. The design can levitate an aluminum micro... View More

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