IEEE - Institute of Electrical and Electronics Engineers, Inc. - Detection and Compensation of Motion Error for Nanomanipulation Platform in Scanning Electron Microscope

2018 15th International Conference on Control, Automation, Robotics and Vision (ICARCV)

Author(s): Mingyu Wang ; Yaqiong Wang ; Zhan Yang ; Tao Chen ; Lining Sun ; Toshio Fukuda
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2018
Conference Location: Singapore, Singapore, Singapore
Conference Date: 18 November 2018
Page(s): 98 - 102
ISBN (Electronic): 978-1-5386-9582-1
ISBN (USB): 978-1-5386-9581-4
DOI: 10.1109/ICARCV.2018.8581134
Regular:

Nanomanipulation system based on scanning electron microscope(SEM) with good real-time visual feedback and nanoscale observation resolution had high operability in a vacuum working environment.... View More

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