IEEE - Institute of Electrical and Electronics Engineers, Inc. - Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables

Author(s): Fazhi Song ; Yang Liu ; Jian-Xin Xu ; Xiaofeng Yang ; Qiao Zhu
Sponsor(s): IEEE Industrial Electronics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 April 2019
Volume: 66
Page(s): 3,106 - 3,116
ISSN (Electronic): 1557-9948
ISSN (Paper): 0278-0046
DOI: 10.1109/TIE.2018.2842756
Regular:

The feedforward controller plays an important role in the achievement of high servo performance of wafer scanning. In this paper, a novel data-driven feedforward tuning method is developed in the... View More

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