IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Novel Actuator-Internal Micro/Nano Positioning Stage with an Arch-Shape Bridge Type Amplifier

Author(s): Fujun Wang ; Zhichen Huo ; Cunman Liang ; Beichao Shi ; Yanling Tian ; Xingyu Zhao ; Dawei Zhang
Sponsor(s): IEEE Industrial Electronics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 1557-9948
ISSN (Paper): 0278-0046
DOI: 10.1109/TIE.2018.2885716
Regular:

This paper presents a novel actuator-internal two degree-of-freedom (2-DOF) micro/nano positioning stage actuated by piezoelectric (PZT) actuators, which can be used as a fine actuation part in... View More

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