IEEE - Institute of Electrical and Electronics Engineers, Inc. - Beyond Performance/Cost Tradeoffs in Motion Control: A Multirate Feedforward Design With Application to a Dual-Stage Wafer System

Author(s): Jurgen van Zundert ; Tom Oomen ; Jan Verhaegh ; Wouter Aangenent ; Duarte J. Antunes ; W. P. M. H. Heemels
Sponsor(s): IEEE Control Systems Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1 - 14
ISSN (CD): 2374-0159
ISSN (Electronic): 1558-0865
ISSN (Paper): 1063-6536
DOI: 10.1109/TCST.2018.2882341
Regular:

Motion systems with multiple control loops often run at a single sampling rate for simplicity of implementation and controller design. The achievable performance in terms of position accuracy is... View More

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