IEEE - Institute of Electrical and Electronics Engineers, Inc. - Optimiztion of novel Interdigitated Electrode Structure for Capacitive Humidity Sensing

2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT)

Author(s): Hong Liu ; Jia Zhou
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2018
Conference Location: Qingdao, China, China
Conference Date: 31 October 2018
Page(s): 1 - 3
ISBN (CD): 978-1-5386-4439-3
ISBN (Electronic): 978-1-5386-4441-6
ISBN (Paper): 978-1-5386-4440-9
DOI: 10.1109/ICSICT.2018.8565714
Regular:

Recently, humidity sensors have been investigated extensively due to its broad application in chip fabrication, health care, agriculture, and so on. We proposed a new structure with a shielding... View More

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