IEEE - Institute of Electrical and Electronics Engineers, Inc. - An Ultra-Low Power CMOS Readout Circuit for a MEMS Resonant Accelerometer

2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT)

Author(s): Yang Zhao ; Guo-Ming Xia ; Qin Shi ; An-Ping Qiu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2018
Conference Location: Qingdao, China, China
Conference Date: 31 October 2018
Page(s): 1 - 3
ISBN (CD): 978-1-5386-4439-3
ISBN (Electronic): 978-1-5386-4441-6
ISBN (Paper): 978-1-5386-4440-9
DOI: 10.1109/ICSICT.2018.8564820
Regular:

This paper presents a modified pierce oscillator based ultra-low power CMOS readout circuit for a MEMS resonant accelerometer. Differential topology is adopted to make the readout circuit... View More

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