IEEE - Institute of Electrical and Electronics Engineers, Inc. - Variability Induced Sensitivity Degradation in Coupled Nano/Micro Resonant Sensors

Author(s): Guowei Tao ; Bhaskar Choubey
Sponsor(s): IEEE Nanotechnology Council
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 July 2018
Volume: 17
Page(s): 709 - 713
ISSN (Electronic): 1941-0085
ISSN (Paper): 1536-125X
DOI: 10.1109/TNANO.2018.2817546
Regular:

Coupled M/NEMS resonators arrays have recently emerged as a promising candidate for multisensing. The collective behavior of the coupled system offers new sensing methods such as eigenvalue and... View More

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