IEC - International Electrotechnical Commission - IEC 60050-523:2018
International Electrotechnical Vocabulary (IEV) - Part 523: Micro-electromechanical devices
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| Organization: | IEC - International Electrotechnical Commission |
| Publication Date: | 6 December 2018 |
| Status: | published |
| Page Count: | 47 |
| ICS Code (Electrical engineering (Vocabularies)): | 01.040.29 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
abstract:
IEC 60050-523:2018 gives the general terminology used for micro-electromechani
Document History
October 17, 2019
Amendment 1 - International Electrotechnical Vocabulary (IEV) - Part 523: Micro-electromechanical systems (MEMS)
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IEC 60050-523:2018
December 6, 2018
International Electrotechnical Vocabulary (IEV) - Part 523: Micro-electromechanical devices
IEC 60050-523:2018 gives the general terminology used for micro-electromechanical devices including the process of production of such devices. This terminology is consistent with the terminology...