IEEE - Institute of Electrical and Electronics Engineers, Inc. - Iterative Identification and Control Using Non-normalized Coprime Factors With Application in Wafer Stage Motion Control

Author(s): Frank Boeren ; Alexander Lanzon ; Tom Oomen
Sponsor(s): IEEE Control Systems Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1 - 12
ISSN (CD): 2374-0159
ISSN (Electronic): 1558-0865
ISSN (Paper): 1063-6536
DOI: 10.1109/TCST.2018.2877680
Regular:

Robustness against model uncertainty is essential in model-based controller design. It is well known that a relatively small uncertainty in lightly damped poles and zeros can result in a large... View More

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