IEEE - Institute of Electrical and Electronics Engineers, Inc. - A 117DB in-Band CMRR 98.5DB SNR Capacitance-to-Digital Converter for Sub-NM Displacement Sensing with an Electrically Floating Target

2018 IEEE Symposium on VLSI Circuits

Author(s): Hui Jiang ; Samira Amani ; Johan G. Vogel ; Saleh Heidary Shalmany ; Stoyan Nihtianov
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2018
Conference Location: Honolulu, HI, USA
Conference Date: 18 June 2018
Page(s): 159 - 160
ISBN (Electronic): 978-1-5386-4214-6
DOI: 10.1109/VLSIC.2018.8502363
Regular:

This paper describes a high-performance Capacitance-to-Digital Converter (CDC) for sub-nm displacement sensing with an electrically floating target. Intended to be integrated into a... View More

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