IEEE - Institute of Electrical and Electronics Engineers, Inc. - Surface Area Enhancement of Nanomechanical Disk Resonators Using MWCNT for Mass Sensing Applications

Author(s): V. Qaradaghi ; B. Dousti ; Y. Choi ; G. S. Lee ; W. Hu ; S. Pourkamali
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 1525-8955
ISSN (Paper): 0885-3010
DOI: 10.1109/TUFFC.2018.2884247
Regular:

This work presents fabrication of thermal-piezoresistive nanoelectromechanical (NEM) silicon disk resonators and their characterization as highly sensitive mass sensors. Forest of... View More

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